Hitachi Industrial Equipment Systems Filter Unit for Manufacturing Equipment
A slim and energy-efficient filter unit that is easy to integrate into semiconductor manufacturing equipment.
Hitachi's fan filter unit has achieved a slim, energy-efficient, and lightweight design by using high-efficiency fans. Even with an increase in electrical components installed on top of the FFU in semiconductor manufacturing equipment, it can be made slimmer without changing specifications such as airflow velocity. Features of the FFU for equipment: - Achieves a lightweight and slim design for easy integration into semiconductor manufacturing equipment. - Realizes high efficiency of motors and fans with minimal heat generation and reduced impact from temperature rise due to high overall fan efficiency. - Capable of accommodating external static pressure of 98Pa, considering pressure loss from chemical filters and other components. - Designed to achieve low power consumption, contributing to energy savings. - Capable of delivering a large airflow with a single fan, providing excellent operability and flexibility for customized solutions. - Can flexibly respond to external airflow control. - All units undergo thorough inspection, ensuring a reliable and safe service system. For further details, please contact us.
- Company：九州機電 福岡支店、大阪営業所、広島営業所、下関営業所
- Price：Other
